| Facilities/Equipments | Model | Description |
|---|---|---|
| Filmetrics | F20 | Non-reflective thin film measurements |
| Thickness range 1nm~10µm | ||
| High Power Microscope | HPM | Optical observation at 10X~100X |
| Dielectric Analyzer | Novocontrol | Electrical properties characterization |
| IV Analyzer | 4/3/2-Point Probe | Electrical properties characterization |
| 3D Surface Profilometer | - | Surface topography analysis with 3D imaging |
| Mask Aligner | MIDAS MDA-400M | Photolithography process and pattern transfer |
| Spin Coater | Laurell WS-650MZ-23NPP | Applying uniform thin films to a flat substrates such at coating photo resist on silicon wafer surface |
| Hot Plate | WISETHERM HP30D | To heat the [liquid & solid] samples with adjustable heat and stir |
| Wet & Dry Oxidation Furnace | 906-1300 MODULAB | Grow silicon dioxide on the silicon surface |
| Temperature up to 1100°C | ||
| Plasma Preen System | II-862 | Substrates cleaning using oxygen as an ozone ambient |
| Thermal Evaporator | AUTO 306 HHV | Applying very thin layer by thermal evaporation for various PVD process |
| ICP-RIE | Samco RIE 10iP | Inductively coupled plasma-reactive-ion etching process |
| Chemically reactive plasma to remove material deposited on wafers | ||
| Muffle Furnace | OXT2-4-10T | Annealing process with temperature up to 1100°C |
| RTA / RTO | RTA [FA RTP MODEL 100] | To anneal rapid sample at temperature 1100°C |
| Thermo-Shaker | Biosan TS-100 | DNA samples shaker |
| Shaker Incubator | NB-205 | DNA samples shaker |
| UV-Vis Spectrometer | Lambda 35 PerkinElmer | Analyze solid/liquid/powder thru optical characterization |
| Autoclave | TOMY SX-500 | Sterilizer to most DNA/bio related process components |
| Centrifuge | 5430-R | DNA and other molecules extraction process |
| Gravity/Natural Convection Oven | GOV-50 | Hydro thermal growing of nano structure |
| Ultrasonic Cleaner | DELTA DC200H | Samples and apparatus cleaning facilities |
| Vacuum Oven | XMTD 8222 | Heat treatment for >98% RH |
| Photoluminescence | Horiba | Contact less, nondestructive method to probe the electronic structure of materials |
| Scanning Electron Microscope [SEM] | JEOL JSM-6010LV | Resolution range 4nm & Magnification up to 300x |
| Potentiostat | Metrohm Autolab PGSTAT204 | Electrical properties and characterization for CV test |
| Spectrophotometer | DS-11 Series Spectrophotometer | Compact instrument delivers full spectrum UV-Vis analysis and fluorescence capability |
| LPCVD Furnace | HLF-1100 | Polysilicon deposition process |
For a full list, please download it here.
Contact Person:
Fabrication & Access – Jasni: +60194118081
Analysis & SEM – Isa: +60134888973
Tech. Fabrication – Luqman: +60124400978
Tech. Analysis – Mira: +60174661969
