Institute of Nano Electronic Engineering

Universiti Malaysia Perlis

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Research Facilities

Facilities/Equipments Model Description
Filmetrics F20 Non-reflective thin film measurements
Thickness range 1nm~10µm
High Power Microscope HPM Optical observation at 10X~100X
Dielectric Analyzer Novocontrol Electrical properties characterization
IV Analyzer 4/3/2-Point Probe Electrical properties characterization
3D Surface Profilometer - Surface topography analysis with 3D imaging
Mask Aligner MIDAS MDA-400M Photolithography process and pattern transfer
Spin Coater Laurell WS-650MZ-23NPP Applying uniform thin films to a flat substrates such at coating photo resist on silicon wafer surface
Hot Plate WISETHERM HP30D To heat the [liquid & solid] samples with adjustable heat and stir
Wet & Dry Oxidation Furnace 906-1300 MODULAB Grow silicon dioxide on the silicon surface
Temperature up to 1100°C
Plasma Preen System II-862 Substrates cleaning using oxygen as an ozone ambient
Thermal Evaporator AUTO 306 HHV Applying very thin layer by thermal evaporation for various PVD process
ICP-RIE Samco RIE 10iP Inductively coupled plasma-reactive-ion etching process
Chemically reactive plasma to remove material deposited on wafers
Muffle Furnace OXT2-4-10T Annealing process with temperature up to 1100°C
RTA / RTO RTA [FA RTP MODEL 100] To anneal rapid sample at temperature 1100°C
Thermo-Shaker Biosan TS-100 DNA samples shaker
Shaker Incubator NB-205 DNA samples shaker
UV-Vis Spectrometer Lambda 35 PerkinElmer Analyze solid/liquid/powder thru optical characterization
Autoclave TOMY SX-500 Sterilizer to most DNA/bio related process components
Centrifuge 5430-R DNA and other molecules extraction process
Gravity/Natural Convection Oven GOV-50 Hydro thermal growing of nano structure
Ultrasonic Cleaner DELTA DC200H Samples and apparatus cleaning facilities
Vacuum Oven XMTD 8222 Heat treatment for >98% RH
Photoluminescence Horiba Contact less, nondestructive method to probe the electronic structure of materials
Scanning Electron Microscope [SEM] JEOL JSM-6010LV Resolution range 4nm & Magnification up to 300x
Potentiostat Metrohm Autolab PGSTAT204 Electrical properties and characterization for CV test
Spectrophotometer DS-11 Series Spectrophotometer Compact instrument delivers full spectrum UV-Vis analysis and fluorescence capability
LPCVD Furnace HLF-1100 Polysilicon deposition process
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For a full list, please download it here.

Contact Person:
Fabrication & Access – Jasni: +60194118081
Analysis & SEM – Isa: +60134888973
Tech. Fabrication – Luqman: +60124400978
Tech. Analysis – Mira: +60174661969

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Institute of Nano Electronic Engineering, Universiti Malaysia Perlis
Lot 106, 108 & 110, Blok A, Taman Pertiwi Indah,
Jalan Kangar-Alor Setar, Seriab 01000 Kangar, Perlis, Malaysia
Tel: +604-979 8581 Fax: +604-979 8578 Email: webmaster.inee@unimap.edu.my

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