Institute of Nano Electronic Engineering

Universiti Malaysia Perlis

  • Facebook
  • Instagram
  • Twitter
  • YouTube
  • About Us
    • Background
    • Mission and Vision
    • Organization
    • Client’s Charter
    • Corporate Video
    • Our Expertise
    • Acknowledgement
  • Research
    • Research Facilities
    • Research Activities
      • Research Focus
      • Research Projects
        • Products
      • Postgraduate
        • Current Students
        • Alumni
      • Collaborations
  • Publications
    • Scoreboard
  • Contact Us
    • Staff Directory
    • Feedback
  • Gallery
    • Video
    • Audio
  • Download
    • Archive
    • Publications
    • Forms
    • OBE Awareness
    • Reports
  • Quick Links
    • Support Links
    • FAQ
    • Sitemap
    • Faculty
    • Other Departments
    • Events
You are here: Home / Publications / Fabrication of Silicon Nanowires Array Using E-beam Lithography Integrated with Microfluidic Channel for pH Sensing

Fabrication of Silicon Nanowires Array Using E-beam Lithography Integrated with Microfluidic Channel for pH Sensing

March 25, 2015 By Editor

Abstract – Silicon nanowires based biosensors have garnered great potential in serving as highly sensitive, label-free and real-time response biosensing application. These biosensors are useful in detecting pH, DNA molecules, proteins and even single viruses. In this paper, we report the geometrical characteristics and performance of silicon nanowires array for pH level detection. The nanowires are designed for 40 nm, 50 nm and 60 nm diameter sizes. Top-Down Nanofabrication (TDN) is utilized in the development of resist mask and nanowires formation from silicon on insulator (SOI) wafer involving scanning electron microscope (SEM) based electron beam lithography (EBL). The smallest silicon nanowires structure achieved is 40 nm width and 30 nm height. The corresponding source and drain are fabricated via two aluminum (Al) electrodes on top of the silicon nanowires array using conventional lithography process. A 100 µm microfluidic channel is attached on the silicon nanowires for the sample solution transportation. pH level detection are performed based on several types of standard aqueous pH buffer solutions (pH 4, pH 7, pH 10 and pH 12) to test the electrical response of the sensor. Morphological and electrical responses have been proposed to verify the characteristics of the silicon nanowires array based pH sensor.

Keywords – Array, E-beam lithography, microfluidic channel, pH sensor, silicon nanowires

Corresponding Author: Mohd Khairuddin Md Arshad
Corresponding Author’s Email: mohd.khairuddin@unimap.edu.my

Full text: PDF

Share this:

  • Click to share on Facebook (Opens in new window)
  • Click to share on Twitter (Opens in new window)
  • Click to share on Pinterest (Opens in new window)
  • Click to email a link to a friend (Opens in new window)
  • More
  • Click to share on Reddit (Opens in new window)
  • Click to share on LinkedIn (Opens in new window)
  • Click to share on WhatsApp (Opens in new window)
  • Click to print (Opens in new window)
  • Click to share on Telegram (Opens in new window)

Filed Under: Publications Tagged With: Array, E-beam lithography, microfluidic channel, pH sensor, silicon nanowires

NEWS @ INEE

  • Postgraduate Studies Opportunity
  • Congratulations Prof. Ir. Dr. Mohd Khairuddin Md Arshad
  • Assoc. Prof. Ts. Dr. Muhammad Mahyiddin Ramli Appointed as New Director of INEE
  • Assoc. Prof. Ts. Dr. Foo Kai Loong Appointed as New Deputy Director of INEE
  • Dr. Mohamad Faris Mohamad Fathil Appointed as New Postgraduate Program Chairman of INEE

EVENTS & ACTIVITIES

  • Call for Paper IEEE International Conference on Sensor & Nanotechnology (SenNano2023)
  • Call for Papers 2022 Joint International Conference on Nanoscience & Nanoengineering (BOND 21 2022)
  • Trace Analysis and Biosensor International Symposium I: Emerging Challenges and Opportunities
  • CSR & STEM Programme: Exploration in The Nano World
  • Nanotechnology and Biosensor Colloquium 2019
Privacy Policy | Security Policy | Disclaimer | Sitemap | FAQ | Feedback | User Guide | Download | Postgraduate

Institute of Nano Electronic Engineering, Universiti Malaysia Perlis
Lot 106, 108 & 110, Blok A, Taman Pertiwi Indah,
Jalan Kangar-Alor Setar, Seriab 01000 Kangar, Perlis, Malaysia
Tel: +604-979 8581 Fax: +604-979 8578 Email: webmaster.inee@unimap.edu.my

Copyright © INEE UniMAP

  • Facebook
  • Instagram
  • Twitter
  • YouTube

For best view, please use latest version of Internet Explorer, Mozilla Firefox and Google Chrome with resolution 1280 x 768 and above.

QS 5 Stars

MQA

MSC Malaysia

myGov

Logo UniMAP

Visits 390 Total 190920

Designed by Mohd Isa from Portal Kerjaya & Sumber Informasi Malaysia