ide Archives – Institute of Nano Electronic Engineering

Abstract – The benefits of the electrical-based biosensor include cheap production and fast response time of detecting diseases. An interdigitated electrode (IDE) is fabricated using silver (Ag) as a metal contact that is deposited on aliminium (Al) nanoparticles doped with both zinc oxide (ZnO) and Silicon (Si) forming AZO/Si nanostructures by vacuum coater in a thermal evaporator. The electrical properties are studied as a function of frequency and voltage using I–V characteristics. Sol–gel method under annealing temperature, 500 °C is utilized to generate Al nanoparticles doped ZnO nanostructures. UV–vis spectrophotometer, Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and X-ray diffractometer (XRD) are used for analyzing optical, topographical, morphological and structural studies of AZO nanostructure, respectively. Specific empirical models of optical dielectric constant, bulk modulus and refractive index are also verified.

Corresponding Author: Prof. Dr. Uda Hashim
Corresponding Author’s Email: uda@unimap.edu.my

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Link to Publication: https://www.sciencedirect.com/science/article/pii/S2238785419304028

Abstract – Micro interdigitated electrodes (IDE’s) have successfully been fabricated and characterized amperometrically for the electrochemical detection of the pH concentration and bio-molecules. In the present work, aluminium (Al) is used act as the metal contact (electrodes) deposited on the silicon substrate using a thermal evaporator (PVD) vacuum coater. The simple conventional photolithography was applied to fabricate the micro-gap capacitive transducer. IDE’s mask is designed using the aid of AutoCAD software for the detection of bio-substance which is an extremely small scale in size before being transferred to commercial chrome mask. The fabricated micro-gap sensor will then further evaluated through surface topology and electrical characteristic. The surface topology was implemented using AFM, LPM, SEM and HPM. The electrical measurements were carried out using a Dielectric analyzer (DA) with 2400 source meter (KEITHLEY) to examine the electrical characteristics such as capacitance and conductance. Purchased pH buffer solutions which varied from pH4 to pH 10 is dropped on the surface of microelectrode and the effect on it is investigated for the application in pH measurement. This study has proven that an increase in the concentration of acidic to alkaline pH leads to proportional to the capacitance.

Corresponding Author: Uda Hashim
Corresponding Author’s Email: uda@unimap.edu.my

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Fabrication and characterizations of Al nanoparticles doped ZnO nanostructures-based integrated electrochemical biosensor

Fabrication of Interdigitated Electrodes (IDE’s) by Conventional Photolithography Technique for pH Measurement Using Micro-Gap Structure